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ArticleJ-GLOBAL ID:200902212402076690整理番号:09A0717205

Thermal stability of sputter deposited nanomosaic rutile TiO2

スパッタ蒸着したナノモザイクルチル型TiO2の熱安定性

著者:AITA Carolyn Rubin(Dep. of Materials and the Advanced Coatings Experimental Lab., Coll. of Engineering and Applied Sci., Univ. of ...)
資料名:J Vac Sci Technol A 巻:27 号:4 ページ:648
発行年:2009年07月
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