Art
J-GLOBAL ID:200902212405247525   Reference number:08A0419977

Spherical Bistable Micromechanism

双安定球面マイクロ機構
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Material:
Volume: 130  Issue:Page: 045001.1-045001.6  Publication year: Apr. 2008 
JST Material Number: H0960A  ISSN: 1050-0472  CODEN: JMDEDB  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Motion mechanism  ,  Manufacturing technology of solid-state devices 
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