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ArticleJ-GLOBAL ID:200902212409381757整理番号:08A0822188

MECHANICAL AND TRIBOLOGICAL PROPERTIES OF TiN AND SiCN NANOCOMPOSITE COATINGS DEPOSITED USING METHYLTRICHLOROSILANE

メチルトリクロロシランを用いて蒸着したTiNとSiCNのナノコンポジットの機械的性質とトライボロジー特性

著者:IVASHCHENKO V. I.(Inst. Problems of Materials Sci., National Acad. Sci. Ukraine, Kiev.)、PORADA O. K.(Inst. Problems of Materials Sci., National Acad. Sci. Ukraine, Kiev.)、IVASHCHENKO L. A.(Inst. Problems of Materials Sci., National Acad. Sci. Ukraine, Kiev.)・・・
資料名:Powder Metall Met Cerm 巻:47 号:1-2 ページ:95-101
発行年:2008年01月
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