Fabrication of 3D Micro-Structure and Analysis of Voxel Generation by Ultra Fast Laser Induced Two-Photon Absorption

YI Shin Wook; LEE Seong Ku; CHO Mi Jung; KONG Hong Jin; YANG Dong-Yol; PARK Sang-hu; LIM Tae-woo; KIM Ran Hee; LEE Kwang-Sup

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J-GLOBAL ID：200902212410423676 Reference number：05A0488679

Fabrication of 3D Micro-Structure and Analysis of Voxel Generation by Ultra Fast Laser Induced Two-Photon Absorption

超高速レーザ誘起2光子吸収による三次元微細構造の製作とボクセル発生の解析

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Material：
Volume： 5715 Page： 118-129 Publication year： 2005
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Special machining

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