Art
J-GLOBAL ID:200902212411777064   Reference number:03A0730423

Ion Balance Control of Soft X-Ray Jet Air Ionizer

軟X線式ジェットイオナイザのイオンバランス制御
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Material:
Volume: 2003  Page: 51-52  Publication year: Sep. 11, 2003 
JST Material Number: F0983B  ISSN: 1342-1492  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electrostatic equipment  ,  X-ray instruments and techniques  ,  Manufacturing technology of solid-state devices 
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