Art
J-GLOBAL ID：200902212412887998
Reference number：04A0598032
Investigation of influence of low energy ion beam parameters on Reactive Ion Beam Synthesis (RIBS) of thin films.
薄膜の反応性イオンビーム合成(RIBS)に対する低エネルギーイオンビームパラメータの影響の研究
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Author (2)：
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Material：
Volume：
5401
Page：
170-178
Publication year：
2004
JST Material Number：
D0943A
ISSN：
0277-786X
CODEN：
PSISDG
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Irradiational changes of metals
Terms in the title (7)：
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