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ArticleJ-GLOBAL ID:200902212413383276整理番号:09A0996278

バイアス温度ストレスを施したCVD‐SiO2/(100)Si界面欠陥のESR観察

著者:三藤裕之(香川大 工)、安藤慎一郎(香川大 工)、神垣良昭(香川大 工)
資料名:応用物理学会学術講演会講演予稿集 巻:70th 号:2 ページ:752
発行年:2009年09月08日
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About J-GLOBAL

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