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ArticleJ-GLOBAL ID:200902212413941180整理番号:07A0350054

Characterization and Experimental Verification of the Nonlinear Distortion in a Technique for Measuring the Relative Velocity Between Micromachined Structures in Normal Translational Motion

垂直並進運動におけるマイクロマシン構造間の相対速度測定技術における非線形歪のキャラクタリゼーションと実験による実証

著者:DEAN Robert Neal, Jr.(Auburn Univ., AL, US)、FLOWERS George T.(Auburn Univ., AL, US)、HORVATH Roland(Structural Integrity Associates, Inc., CO, USA)・・・
資料名:IEEE Sens J 巻:7 号:3-4 ページ:496-501
発行年:2007年03月
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