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ArticleJ-GLOBAL ID:200902212414520005整理番号:06A0646417

Higher current density operation with EB reticle writer EBM-5000

電子ビームレチクル書込装置EBM‐5000の高電流密度運転

著者:SAITO Masato(Toshiba Corp., Kawasaki, JPN)、UGAJIN Kunihiro(Toshiba Corp., Kawasaki, JPN)、HIGAKI Tomotaka(Toshiba Corp., Kawasaki, JPN)・・・
資料名:Proc SPIE 巻:6283 号:Pt.1 ページ:62831L.1-62831L.10
発行年:2006年
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.