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ArticleJ-GLOBAL ID:200902212416207134整理番号:07A0053825

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

圧電窒化アルミニウム振動輪郭モードMEMS共振器

著者:PIAZZA Gianluca(Univ. Pennsylvania, PA, USA)、STEPHANOU Philip J.(Univ. California, CA, USA)、PISANO Albert P.(Univ. California, CA, USA)
資料名:J Microelectromechanical Syst 巻:15 号:6 ページ:1406-1418
発行年:2006年12月
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