Art
J-GLOBAL ID：200902212416207134   Reference number：07A0053825

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

圧電窒化アルミニウム振動輪郭モードMEMS共振器
Author (3)：
PIAZZA Gianluca

About PIAZZA Gianluca

(Univ. Pennsylvania, PA, USA)

About Univ. Pennsylvania, PA, USA

, 
STEPHANOU Philip J.

About STEPHANOU Philip J.

(Univ. California, CA, USA)

About Univ. California, CA, USA

, 
PISANO Albert P.

About PISANO Albert P.

(Univ. California, CA, USA)

About Univ. California, CA, USA


Material：
Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)

About Journal of Microelectromechanical Systems


Volume： 15  Issue： 6  Page： 1406-1418  Publication year： Dec. 2006 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*resonator

About resonator

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
MEMS

About MEMS


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Resonator 
(NC04050Y)

About Resonator

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
圧電

About 圧電

, 
窒化アルミニウム

About 窒化アルミニウム

, 
輪郭

About 輪郭

, 
MEMS共振器

About MEMS共振器


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