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ArticleJ-GLOBAL ID:200902212417523463整理番号:03A0425562

粉末ターゲットを用いたスパッタリング法で生成したGaN膜の残留応力評価

著者:日下一也(徳島大 工)、英崇夫(徳島大 工)、富永喜久雄(徳島大 工)
資料名:日本材料学会学術講演会講演論文集 巻:52nd ページ:63-64
発行年:2003年05月16日
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.