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ArticleJ-GLOBAL ID:200902212422969194整理番号:07A0377799

La2O3/Sc2O3積層構造ゲート絶縁膜による耐熱性向上に関する検討(2)

著者:椎野泰洋(東京工大 フロンティア創造共同研セ)、角嶋邦之(東京工大 大学院総合理工学研究科)、AHMET Parhat(東京工大 フロンティア創造共同研セ)・・・
資料名:応用物理学関係連合講演会講演予稿集 巻:54th 号:2 ページ:859
発行年:2007年03月27日
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About J-GLOBAL

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