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ArticleJ-GLOBAL ID:200902212431253266整理番号:04A0798027

The Pulse Thermal Processing of Nanocrystalline Silicon Thin-Films

ナノ結晶シリコン薄膜のパルス熱加工

著者:OTT R D(Oak Ridge National Lab. in Oak Ridge, TN)、KADOLKAR P(Oak Ridge National Lab. in Oak Ridge, TN)、BLUE C A(Oak Ridge National Lab. in Oak Ridge, TN)・・・
資料名:JOM 巻:56 号:10 ページ:45-47
発行年:2004年10月
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