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ArticleJ-GLOBAL ID:200902212433475207整理番号:08A1208736

FEAを用いたマイクロ熱センサの断熱について

On Heat Insulation of Micro Thermal Sensor Using FEA

著者:MA Binghe(Micro and Nano Electromechanical Systems Lab., Northwestern Polytechnical Univ., Xi’an)、ZHOU Baoqing(Micro and Nano Electromechanical Systems Lab., Northwestern Polytechnical Univ., Xi’an)、DENG Jinjun(Micro and Nano Electromechanical Systems Lab., Northwestern Polytechnical Univ., Xi’an)・・・
資料名:Chuangan Jishu Xuebao 巻:21 号:6 ページ:933-937
発行年:2008年
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