Art
J-GLOBAL ID：200902212436177304   Reference number：06A0365591

Numerical study on three-dimensional isothermal solid-gas flow and deposition process in a deposition chamber

蒸着室における三次元等温固体-ガス流及び蒸着過程の数値計算
Author (1)：
KO T.h.

About KO T.h.

(Dep. of Mechanical Engineering, Lunghwa Univ. of Sci. and Technol., 300, Wan-Shou Rd., Sec. 1, Kueishan, 33306 ...)

About Dep. of Mechanical Engineering, Lunghwa Univ. of Sci. and Technol., 300, Wan-Shou Rd., Sec. 1, Kueishan, 33306 ...


Material：
International Communications in Heat and Mass Transfer  (Int Commun Heat Mass Transf)

About International Communications in Heat and Mass Transfer


Volume： 33  Issue： 5  Page： 601-609  Publication year： May. 2006 
JST Material Number： H0300B  ISSN： 0735-1933  CODEN： IHMTDL  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*plasma CVD

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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plasma enhanced chemical vapor deposition

About plasma enhanced chemical vapor deposition

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JST classification (1)：
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Applications of plasma 
(BJ02110K)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
蒸着

About 蒸着

, 
固体

About 固体

, 
ガス流

About ガス流

, 
蒸着過程

About 蒸着過程

, 
数値計算

About 数値計算


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