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ArticleJ-GLOBAL ID:200902212436177304整理番号:06A0365591

Numerical study on three-dimensional isothermal solid-gas flow and deposition process in a deposition chamber

蒸着室における三次元等温固体‐ガス流及び蒸着過程の数値計算

著者:KO T.h.(Dep. of Mechanical Engineering, Lunghwa Univ. of Sci. and Technol., 300, Wan-Shou Rd., Sec. 1, Kueishan, 33306 ...)
資料名:Int Commun Heat Mass Transf 巻:33 号:5 ページ:601-609
発行年:2006年05月
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