Art
J-GLOBAL ID：200902212441461444   Reference number：04A0666090

Topography control using sacrificial capping layers

犠牲キャッピング層を用いたトポグラフィー制御
Author (1)：
BAKER R

About BAKER R

(Rohm and Haas Electronic Materials CMP Technol., Delaware)

About Rohm and Haas Electronic Materials CMP Technol., Delaware


Material：
Solid State Technology  (Solid State Technol)

About Solid State Technology


Volume： 47  Issue： 8  Page： 33-34,36  Publication year： Aug. 2004 
JST Material Number： E0226A  ISSN： 0038-111X  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
layer

About layer

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
sacrificing layer

About sacrificing layer

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=04A0666090&from=J-GLOBAL&jstjournalNo=E0226A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Other surface treatment 
(WC08070F)

About Other surface treatment

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
犠牲

About 犠牲

, 
キャッピング層

About キャッピング層

, 
トポグラフィー

About トポグラフィー


Return to Previous Page

TOP

BOTTOM