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ArticleJ-GLOBAL ID:200902212449073044整理番号:08A0061803

Rapid transport of nano-particles having a fractional elementary charge on average in capacitively-coupled rf discharges by amplitude-modulating discharge voltage

容量結合rf放電における平均分数素電荷を有するナノ粒子の振幅変調放電電圧による迅速輸送

著者:SHIRATANI Masaharu(Kyushu Univ., Fukuoka, JPN)、KOGA Kazunori(Kyushu Univ., Fukuoka, JPN)、IWASHITA Shinya(Kyushu Univ., Fukuoka, JPN)・・・
資料名:Faraday Discuss 巻:137 ページ:127-138
発行年:2008年
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