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ArticleJ-GLOBAL ID:200902212456559114整理番号:07A0609401

The development of fan filter unit with flow rate feedback control in a cleanroom

クリーンルームにおける流速のフィードバック制御を有するファンフィルタユニットの開発

著者:CHEN Juhn-jie(Energy & Environment Laboratories, Industrial Technol. Res. Inst., Taiwan, TWN)、LAN Chao-ho(Energy & Environment Laboratories, Industrial Technol. Res. Inst., Taiwan, TWN)、JENG Ming-shan(Energy & Environment Laboratories, Industrial Technol. Res. Inst., Taiwan, TWN)・・・
資料名:Build Environ 巻:42 号:10 ページ:3556-3561
発行年:2007年10月
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