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J-GLOBAL ID:200902212468424575   Reference number:03A0847691

金負イオン注入により熱酸化膜中に形成したナノ粒子の分布深さと注入エネルギーの関係

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Material:
Volume: 44th  Page: 110  Publication year: Nov. 12, 2003 
JST Material Number: L1308A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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Applications of electron beams and ion beams  ,  Powder technology 

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