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ArticleJ-GLOBAL ID:200902212468424575整理番号:03A0847691

金負イオン注入により熱酸化膜中に形成したナノ粒子の分布深さと注入エネルギーの関係

著者:辻博司(京大 大学院工学研究科)、洗暢俊(京大 大学院工学研究科)、上野和也(京大 大学院工学研究科)・・・
資料名:真空に関する連合講演会講演予稿集 巻:44th ページ:110
発行年:2003年11月12日
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.