Art
J-GLOBAL ID：200902212475643304   Reference number：04A0399368

Effects of slurry filter size on the chemical mechanical polishing (CMP) defect density

化学機械研磨(CMP)欠陥密度に及ぼすスラリーフィルタサイズの影響
Author (5)：
SEO Y-J

About SEO Y-J

(Daebul Univ., Chonnam-Do, KOR)

About Daebul Univ., Chonnam-Do, KOR

, 
KIM S-Y

About KIM S-Y

(ANAM Semiconductor Co., Inc., Kyunggi-do, KOR)

About ANAM Semiconductor Co., Inc., Kyunggi-do, KOR

, 
CHOI Y-O

About CHOI Y-O

(Chosun Univ., Gwangju, KOR)

About Chosun Univ., Gwangju, KOR

, 
OH Y-T

About OH Y-T

(Chosun Univ., Gwangju, KOR)

About Chosun Univ., Gwangju, KOR

, 
LEE W-S

About LEE W-S

(Chosun Univ., Gwangju, KOR)

About Chosun Univ., Gwangju, KOR


Material：
Materials Letters  (Mater Lett)

About Materials Letters


Volume： 58  Issue： 15  Page： 2091-2095  Publication year： Jun. 2004 
JST Material Number： E0935A  ISSN： 0167-577X  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*freezing and solidification

About freezing and solidification

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Dust collection 
(XD02100D)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
化学機械研磨

About 化学機械研磨

, 
CMP

About CMP

, 
欠陥密度

About 欠陥密度


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