Art
J-GLOBAL ID：200902212480074350   Reference number：05A0030476

Trial of Micro-Fabrication by Desktop Machine Tools

デスクトップマシンツールによる微細加工の試み
Author (6)：
UEHARA YOSHIHIRO

About UEHARA YOSHIHIRO

(理研)

About 理研

, 
OMORI HITOSHI

About OMORI HITOSHI

(理研)

About 理研

, 
LIN W

About LIN W

(理研)

About 理研

, 
WATANABE YUTAKA

About WATANABE YUTAKA

(理研)

About 理研

, 
ISHIKAWA SOICHI

About ISHIKAWA SOICHI

(新世代加工システム)

About 新世代加工システム

, 
MITSUISHI NORIHIDE

About MITSUISHI NORIHIDE

(新世代加工システム)

About 新世代加工システム


Material：
日本機械学会生産加工・工作機械部門講演会講演論文集

About 日本機械学会生産加工・工作機械部門講演会講演論文集


Volume： 5th  Page： 345-346  Publication year： Nov. 19, 2004 
JST Material Number： L3643A  ISSN： 1348-3943  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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precision grinding

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,...
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ELID研削

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,...
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JST classification (1)：
JST classification
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Grinding 
(QC03000R)

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微細加工

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, 
試み

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