Art
J-GLOBAL ID:200902212487499780   Reference number:07A0026058

Growth mode of SrRuO3 thin films with oxygen pressure on stepped SrTiO3 substrates

ステップSrTiO3基板上の酸素圧力でのSrRuO3薄膜の成長モード
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Material:
Volume: 6th  Page: 97-98  Publication year: 2006 
JST Material Number: Y0378B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
Abstract/Point:
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SrRuO3 thin films h...
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JST classification (2):
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Manufacturing technology of solid-state devices  ,  Techniques and equipment of thin film deposition 
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