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ArticleJ-GLOBAL ID:200902212487528144整理番号:09A0519507

積層MEMSのためのパルスレーザー支援デブリフリー低ストレスダイシング技術

Debris-Free Low-Stress Dicing Assisted by Pulsed Laser for Multi-Layered MEMS

著者:鶴見洋輔(大阪大 レーザーエネルギー学研究セ)、井澤友策(大阪大 レーザーエネルギー学研究セ)、福士秀幸(東北大 大学院工学研究科)・・・
資料名:レーザー研究 巻:37 号:5 ページ:384-388
発行年:2009年05月15日
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.