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J-GLOBAL ID:200902212487528144   Reference number:09A0519507

Debris-Free Low-Stress Dicing Assisted by Pulsed Laser for Multi-Layered MEMS

積層MEMSのためのパルスレーザー支援デブリフリー低ストレスダイシング技術
Author (9):
Material:
Volume: 37  Issue:Page: 384-388  Publication year: May. 15, 2009 
JST Material Number: X0335A  ISSN: 0387-0200  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

JST classification (2):
JST classification
Category name(code) classified by JST.
Applications of lasers  ,  Optical integrated circuits,integrated optics 
Reference (4):
  • BARSCH, N. Appl. Phys. A. 2003, 77, 237
  • KOZUKI, Y. Proc. LAMP 2006, Kyoto, May 16-19. 2006
  • FUKUMITSU, K. Proc. LAMP 2006, Kyoto, May 16-19. 2006
  • MONODANE, T. Proc. LAMP 2006, Kyoto, May 16-19. 2006

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