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ArticleJ-GLOBAL ID:200902212490864007整理番号:06A0448527

Planarization Efficiency of Electrochemical Mechanical Deposition and Its Dependence on Process Parameters

電気化学機械析出の平坦化効率およびプロセスパラメータに対するの依存性

著者:BASOL Buelent M.(ASM NuTool, Inc., California, USA)、ERDEMLI Serkan(ASM NuTool, Inc., California, USA)、UZOH Cyprian E.(ASM NuTool, Inc., California, USA)・・・
資料名:J Electrochem Soc 巻:153 号:3 ページ:C176-C181
発行年:2006年
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