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ArticleJ-GLOBAL ID:200902212501013136整理番号:04A0083905

Effect of nitrogen content at coating film and film thickness on nanohardness and Young's modulus of hydrogenated carbon films

水素化炭素膜のナノ硬度及びYoung率に対する膜部分の窒素含有量と膜厚の影響

著者:LIN J F(National Cheng Kung Univ., Tainan, TWN)、WEI P J(National Cheng Kung Univ., Tainan, TWN)、PAN J C(National Cheng Kung Univ., Tainan, TWN)・・・
資料名:Diam Relat Mater 巻:13 号:1 ページ:42-53
発行年:2004年01月
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