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ArticleJ-GLOBAL ID:200902212504067555整理番号:06A0269003

各種鉄ソースを用いた蒸着法によるβ‐FeSi2生成層の高純度化の検討(I)

著者:花村祥(金沢工大 デバイスシステムR&Dセ)、南内嗣(金沢工大 デバイスシステムR&Dセ)、宮田俊弘(金沢工大 デバイスシステムR&Dセ)・・・
資料名:応用物理学関係連合講演会講演予稿集 巻:53rd 号:3 ページ:1464
発行年:2006年03月22日
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