About J-GLOBAL

日本語

Font size
  • A
  • A

Articleの詳細情報

ArticleJ-GLOBAL ID:200902212504818526整理番号:07A0473839

Ion-bombardment characteristics during deposition of TiN films using a grid-assisted magnetron system with enhanced plasma potential

高プラズマ電位のグリッド支援マグネトロンシステムを用いたTiN膜の堆積中におけるイオン照射特性

著者:KUDLACEK P.(Dep. of Physics, Univ. of West Bohemia, Univerzitni 22, 306 14 Plzen, CZE)、VLCEK J.(Dep. of Physics, Univ. of West Bohemia, Univerzitni 22, 306 14 Plzen, CZE)、HOUSKA J.(Dep. of Physics, Univ. of West Bohemia, Univerzitni 22, 306 14 Plzen, CZE)・・・
資料名:Vacuum 巻:81 号:9 ページ:1109-1113
発行年:2007年05月25日
  • J-GLOBAL home
  • Bookmark J-GLOBAL

J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.