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ArticleJ-GLOBAL ID:200902212511085291整理番号:06A0056792

Growth of carbon nanotubes by RF-PECVD-Lowering of growth temperature by pretreatment of catalyst film-

RF‐PECVDによるカーボンナノチューブの成長‐触媒フィルムの前処理による成長温度の低下

著者:SAKAI Takamichi(Mie Univ., Tsu, JPN)、SUZUKI Atsushi(Mie Univ., Tsu, JPN)、SATO Hideki(Mie Univ., Tsu, JPN)・・・
資料名:フラーレン・ナノチューブ総合シンポジウム講演要旨集 巻:30th ページ:72
発行年:2006年01月07日
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