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ArticleJ-GLOBAL ID:200902212513544730整理番号:04A0002950

Characterization of diamond-like carbon films formed by magnetically enhanced plasma chemical vapor deposition

磁場強化プラズマ化学気相成長法で作製したダイヤモンド状カーボン膜の特性評価

著者:INAGAWA K(ULVAC Inc., Ibaraki, JPN)、ZENIYA T(ULVAC Inc., Ibaraki, JPN)、HIBINO N(ULVAC Inc., Ibaraki, JPN)
資料名:Surf Coat Technol 巻:169/170 ページ:344-347
発行年:2003年06月02日
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