2010 - 2012 Development of a micro probe unit for motion error measurement using three-point method and proof of an algorithm for reducing zero-adjustment error
2007 - スクイーズ膜支持効果に関する基礎研究
2005 - 微小変位機構に関する研究
1998 - 2000 PZTを利用した超微小変位機構の開発
1996 - 1998 粗微動一体形超精密送り装置の開発
1996 - 1997 DEVELOPMENT OF ULTRAFINE FEED UNIT COMBINED BY COARSE AND FINE FEEDING ON SINGLE ELEMENT
1996 - 送りねじによる間座予圧変化を利用した位置決め
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Papers (29):
Hiroki SHIMIZU, Koichi TAMIYA, Shoichiro MIZUKAMI, Yuma TAMARU. A MEMS device for straightness measurement integrating 10 cantilever displacement sensors. Proceedings of The 10th International Conference on Leading Edge Manufacturing in 21st Century. 2021. 409-411
Yuma TAMARU, Kensuke KAWATA, Hiroki SHIMIZU. Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces. Proceedings of The 10th International Conference on Leading Edge Manufacturing in 21st Century. 2021. 640-645
K. Murayama, Y. Tamaru, H. Shimizu. High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials. Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology. 2019. C13
Yuma Tamaru, Tetsuya Matsumoto, Hiroki Shimizu. Development of Fine Feed Table for Non-Contact Support and Positioning with Squeezed-Air Effect. Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology. 2019. E26
Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru. Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors. Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments. 2019. D08
Development of fine positioning table supported by squeezed air films based on levitation force control (5th report) - Properties of long-stroke feed -
Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces
(The 10th International Conference on Leading Edge Manufacturing in 21st Century)
Development of fine positioning table supported by squeezed air films based on levitation force control (4th report)
Development of fine positioning table supported by squeezed air films based on levitation force control (3rd report) - Consideration of support ability improvement by parallelism alignment -
(2021)