Rchr
J-GLOBAL ID:200901089925275130   Update date: Sep. 28, 2008

Toshikawa Kiyohiko

トシカワ キヨヒコ | Toshikawa Kiyohiko
Affiliation and department:
Job title: その他
Research keywords  (1): 真空紫外光CVD
Research theme for competitive and other funds  (2):
  • 2002 - 2004 真空紫外光CVD法によるシリコン薄膜作製の研究
  • -
Patents (1):
  • 特許第342959号
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