Rchr
J-GLOBAL ID：200901094930032789
Update date: Jul. 01, 2023
Matsui Shinji
マツイ シンジ | Matsui Shinji
Research field (1)：
Electronic devices and equipment
Research keywords (2)：
ナノテクロノジー
, Nanotechnology
Research theme for competitive and other funds (2)：
ナノテクノロジーに関する研究
Research on Nanotechnology
MISC (5)：
MATSUI S. Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition. Journal of Vacuum Science & Technology B. 2000. 18. 6. 3181-3184
Nanostructure Fabrication using Electron Beam. MRS symposium Proceedings. Material Issues and Modeling for Perice Nanofabrication. 2000. 584. 293-303
Material-wave nanotechnology : Nanofabrication using a de Broglie wave. J. Vac. Sci. & Technol. B. 1998. 16. 4. 2439-2443
Nanostructure Fabrication Using Electron Beam and Its Application to Nanometer Devices. IEEE. 1997. 85. 4. 629-643
J Fujita, M Morinaga, T Kishimoto, M Yasuda, S Matsui, F Shimizu. Manipulation of an atomic beam by a computer-generated hologram. NATURE. 1996. 380. 6576. 691-694
Books (1)：
Sub-Half-Micron Lithography for ULSIs
Cambridge University Press 2000
Education (2)：
- 1981 Osaka University
- 1981 Osaka University Graduate School, Division of Engineering Science
Professional career (1)：
(BLANK)
Association Membership(s) (2)：
放射光学会
, 応用物理学会
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