Rchr
J-GLOBAL ID:200901098354388128
Update date: May. 15, 2020
Wakasugi Katsuhiko
ワカスギ カツヒコ | Wakasugi Katsuhiko
Affiliation and department:
Job title:
大学院学生(博士課程)
Homepage URL (1):
http://www.eecs.kumamoto-u.ac.jp/eecs/labs/device-lab/device-lab-j.html
Research field (3):
Electronic devices and equipment
, Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research keywords (17):
LSI fabrication
, optical lithography
, maskless lithography
, ULSI Design
, Evaluation
, Thin Film Production
, Plasma Process
, Thin Film
, LSI製造
, 光リソグラフィー
, マスクレスリソグラフィー
, 回路設計
, 集積回路
, 評価
, 薄膜作製
, プラズマプロセス
, 薄膜
Research theme for competitive and other funds (4):
- QTAT(短工期)電子回路パターニング技術開発
- サブ0.1um半導体プロセス用拡散防止膜の開発
- Development of QTAT(Quick-Turn-Around-Time)Electronic Circuit Patterning System
- Development of The Ultra-Thin Diffusion Barrier Layer for Sub 0.1um Semiconductor Processes
MISC (2):
Patents (2):
-
揮発性半導体記憶装置及びデータ処理装置 特開2000-123576
-
Volatile Semiconductor Memory Storage and Data-Processing Equipment
Education (4):
- - 1997 Kumamoto University
- - 1997 Kumamoto University Graduate School, Division of Engineering
- - 1995 Kumamoto University Faculty of Engineering
- - 1995 Kumamoto University Faculty of Engineering
Professional career (1):
- (BLANK) (Kumamoto University)
Work history (4):
- 1997 - 1999 株式会社 日立超LSIシステムズ ULSI開発部 RAMマクロ開発グループ所属
- 1997 - 1999 Hitachi ULSI Systems Co., Ltd. ULSI Development Dep. RAM Macro-Cell Development
- 1999 - - 株式会社 ロジック・リサーチ LSI設計エンジニア
- 1999 - - Logic Research Co., Ltd. LSI Design Engineer
Association Membership(s) (4):
電子情報通信学会
, 応用物理学会
, Information and Communication Engineers
, The Institute of Electronics
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