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ArticleJ-GLOBAL ID:200902076464670430整理番号:85A0094698

Gas-phase reactions of CF3 and CF2 with hydrogen atoms: Their significance in plasma processing.

CF3またはCF2と水素原子との気相反応 プラズマ加工におけるその重要性

著者:RYAN K R(CSIRO, Australia)、PLUMB I C(CSIRO, Australia)
資料名:Plasma Chem Plasma Process 巻:4 号:3 ページ:141-146
発行年:1984年09月
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