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ArticleJ-GLOBAL ID:200902076491622855整理番号:83A0319260

エネルギー分布を持つHeイオン照射したSiCの表面損傷

著者:宮川草児(名古屋工技試)、阿藤康郎(名古屋工技試)、宮川佳子(名古屋工技試)
資料名:真空 巻:26 号:5 ページ:456-460
発行年:1983年05月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.