Art

J-GLOBAL ID：200902076531537805   Reference number：91A0902062

The application of secondary neutral mass spectrometry to semiconductor thin film characterization.

Author (1)： GANSCHOW O (Leybold AG, Koeln, DEU)
Material： Analytical Techniques for Semiconductor Materials and Process Characterization  (Anal Tech Semicond Mater Process Charact)
Page： 190-214  Publication year： 1990 
JST Material Number： K19910552  Document type： Proceedings
Country of issue： United States (USA)  Language： ENGLISH (EN)