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J-GLOBAL ID:200902076556710242   Reference number:93A0471566

An interconnect technology for high density multichip systems.

高密度マルチチップシステムの配線接続技術
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Volume: 35th  Issue: Vol 2  Page: 1249-1251  Publication year: 1992 
JST Material Number: D0551A  ISSN: 1548-3746  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 

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