Investigation of composition profiles in thin phosphorus-silicate glass layers.

SHIRSHOV YU M; NABOK A V; KOPYLOV O N; KROPMAN D I

Art

J-GLOBAL ID：200902076563026101 Reference number：86A0485241

Investigation of composition profiles in thin phosphorus-silicate glass layers.

けい酸りんガラス層での組成プロファイルの研究

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Material：
Volume： 95 Issue： 1 Page： 185-192 Publication year： May. 1986
JST Material Number： D0774A ISSN： 0031-8965 Document type： Article
Article type：原著論文 Country of issue： Germany, Federal Republic of (DEU) Language： ENGLISH (EN)

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Diffusion in solids in general , Structure of other amorphous materials

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