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ArticleJ-GLOBAL ID:200902076563026101整理番号:86A0485241

Investigation of composition profiles in thin phosphorus-silicate glass layers.

けい酸りんガラス層での組成プロファイルの研究

著者:SHIRSHOV YU M(Inst. Semiconductors, Academy of Sciences of the Ukrainian SSR, USSR)、NABOK A V(Inst. Semiconductors, Academy of Sciences of the Ukrainian SSR, USSR)、KOPYLOV O N(Inst. Semiconductors, Academy of Sciences of the Ukrainian SSR, USSR)・・・
資料名:Physica Status Solidi. A. Applied Research 巻:95 号:1 ページ:185-192
発行年:1986年05月
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