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ArticleJ-GLOBAL ID:200902076630748346整理番号:89A0339361

セラミックスへのプラズマ利用 プラズマの化学種計測

Applications of plasma to processing of ceramics. Diagnostics of chemical species in plasmas.

著者:松本修(青山学院大 理工)
資料名:セラミックス 巻:24 号:5 ページ:444-447
発行年:1989年05月
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