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ArticleJ-GLOBAL ID:200902076653568728整理番号:91A0138565

内部応力を相殺したTiB2,ZrB2スパッタ膜

TiB2 and ZrB2 sputtered film which offsetted internal stress.

著者:村田秀明(ライムズ)、鈴木卓哉(ライムズ)、宮川亜夫(ライムズ)
資料名:表面技術協会講演大会講演要旨集 巻:81st ページ:185-186
発行年:1990年03月
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