TiB<sub>2</sub> and ZrB<sub>2</sub> sputtered film which offsetted internal stress.

MURATA HIDEAKI; SUZUKI TAKUYA; MIYAGAWA TSUGIO

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J-GLOBAL ID：200902076653568728 Reference number：91A0138565

TiB₂ and ZrB₂ sputtered film which offsetted internal stress.

内部応力を相殺したTiB₂,ZrB₂スパッタ膜

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Author (3)： , ,
Material：
Volume： 81st Page： 185-186 Publication year： Mar. 1990
JST Material Number： Y0050A ISSN： 0917-2947 Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Ceramic coating to metallic materials

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TiB2 and ZrB2 sputtered film which offsetted internal stress.

TiB₂ and ZrB₂ sputtered film which offsetted internal stress.