Art
J-GLOBAL ID：200902076656975081
Reference number：82A0463087
Preparation of Na+-selective electrodes by ion-implantation of lithium and silicon into single-crystal alumina wafer and its application to the production of ISFET.
アルミナ単結晶ウエハへのリチウム及びけい素のイオン注入によるナトリウムイオン選択電極の調製とイオン選択電界効果トランジスタ(ISFET)製造への応用
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Author (4)：
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Material：
Volume：
312
Issue：
6
Page：
526-529
Publication year：
Aug. 1982
JST Material Number：
E0425A
ISSN：
0016-1152
CODEN：
ZACFAU
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electrometric analysis in general
Terms in the title (11)：
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