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ArticleJ-GLOBAL ID:200902076656975081整理番号:82A0463087

Preparation of Na+-selective electrodes by ion-implantation of lithium and silicon into single-crystal alumina wafer and its application to the production of ISFET.

アルミナ単結晶ウエハへのリチウム及びけい素のイオン注入によるナトリウムイオン選択電極の調製とイオン選択電界効果トランジスタ(ISFET)製造への応用

著者:SANADA Y、AKIYAMA T、UJIHIRA Y・・・
資料名:Fresenius Z Anal Chem 巻:312 号:6 ページ:526-529
発行年:1982年08月
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