Art
J-GLOBAL ID：200902076678104416
Reference number：91A0563126
Ion Beam Assisted Deposition of SiNx thin films.
IBAD法によるSiNx成膜
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=91A0563126©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0563126&from=J-GLOBAL&jstjournalNo=Y0054A") }}
Author (4)：
,
,
,
Material：
Volume：
38th
Issue：
Pt 2
Page：
517
Publication year：
Mar. 1991
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
,
Return to Previous Page
