Art

J-GLOBAL ID：201102233473814417   Reference number：11A1420064

The influence of temperature and atmosphere on the thermal etching of AION

AlONの熱的エッチングに及ぼす温度と雰囲気の影響

Author (11)： Yu Jian (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Lu Tiecheng (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Qi Jianqi (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Wen Ya (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Wang Haiping (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Wen Jinsong (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Yang Zhilin (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Wang Yuezhong (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Xiao Lei (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Yu Yin (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu) ,  Wei Nian (Dep. of Physics & Key Lab. for Radiation Physics and Technol. of Ministry of Education, Sichuan Univ., Chengdu)
Material： Sichuan Daxue Xuebao. Zirankexueban  (Journal of Sichuan University. Natural Science Edition)
Volume： 47  Issue： 3  Page： 615-618  Publication year： 2010 
JST Material Number： C2595A  ISSN： 0490-6756  CODEN： SCTHAO  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Thesaurus term： *etching ,  scanning electron microscope ,  electron microscopy ,  Aluminum ,  dopant ,  ceramics ,  oxide ,  nitride ,  spinel ,  oxynitride
Semi thesaurus term： oxynitride ,  scanning electron microscope

JST classification (1)： Numerical computation  (JE02000J)

Terms in the title (2)： エッチング ,  雰囲気