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J-GLOBAL ID：201602236492680666   Reference number：16A0988119

Synthesis and Characterization of Novel Single-Phased TiBCN Nano-Films by Vacuum Evaporation of TiBCN Powder

新型TIBCN単相金属セラミック粉末調製ナノ薄膜の特性の研究に基づく【JST・京大機械翻訳】

Author (6)： Fu Xiuhua (Department of Optics and Electric Engineering,Changchun University of Science and Technology) ,  Pan Yonggang (Department of Optics and Electric Engineering,Changchun University of Science and Technology) ,  Dong Jun (Changchun Yidong Clutch Co.,Ltd.) ,  Hu Jiandong (Key Laboratory of Automobile Materials, Ministry of Education, College of Materials Science and Engineering,Jilin University) ,  Liu Dongmei (Department of Optics and Electric Engineering,Changchun University of Science and Technology) ,  Zhang Jing (Department of Optics and Electric Engineering,Changchun University of Science and Technology)
Material： Zhenkong Kexue yu Jishu Xuebao  (Journal of Vacuum Science and Technology)
Volume： 36  Issue： 3  Page： 296-300  Publication year： 2016 
JST Material Number： C2159A  ISSN： 1672-7126  CODEN： CKKSDV  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： A novel type ofsingle phased T...

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Thesaurus term： X-ray diffraction ,  rigid body ,  aluminum ,  *ceramics ,  metallicity ,  hardness ,  *powder ,  energy dissipation ,  evaporation ,  *thin film ,  crystal grain ,  *monophase ,  *nanosheet
Semi thesaurus term： 六方晶窒化ホウ素 ,  電界放出型走査電子顕微鏡 ,  *ナノ薄膜 , 【Automatic Indexing@JST】

Author keywords (5)： Thin film ,  TiBCN ,  Thermal Evaporation ,  Ceramic powder ,  Microstructure

JST classification (1)： Thermoelectric devices  (NC03090J)

Terms in the title (5)： 単相 ,  セラミック粉末 ,  調製 ,  ナノ薄膜 ,  研究