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J-GLOBAL ID：201602278241135318   Reference number：16A0879390

Design and stiffness analysis of a XYZ scanning stage

XYZ走査ステージの設計と剛性解析【Powered by NICT】

Author (5)： Cai Kunhai (Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, 300072, China) ,  Tian Yanling (Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, 300072, China) ,  Cui Liangyu (Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, 300072, China) ,  Yang Zhen (Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, 300072, China) ,  Zhang Dawei (Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, 300072, China)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： MARSS  Page： 1-6  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： A compact XYZ precision scanni...

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Thesaurus term： hinge ,  energy method ,  cross coupling reaction ,  *scanning ,  symmetry ,  bandwidth ,  scanner ,  *rigidity ,  flexibility ,  modeling
Semi thesaurus term： 分離性能 ,  有限要素解析 ,  相当歪 ,  圧電アクチュエータ ,  精密位置決め , 【Automatic Indexing@JST】

JST classification (1)： Pattern recognition  (JE07000S)

Terms in the title (5)： 走査 ,  ステージ ,  設計 ,  剛性 ,  解析