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J-GLOBAL ID:201602295231281173   Reference number:16A0069606

Effect of electrode offset on capacitance gradient in micro force measurement based on capacitive sensor

容量性センサを用いた微小力測定における静電容量勾配に及ぼす電極オフセットの影響【Powered by NICT】
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Volume: 29  Issue:Page: 14-20  Publication year: 2015 
JST Material Number: C2677A  ISSN: 1000-7105  Document type: Article
Article type: 原著論文  Country of issue: China (CHN)  Language: CHINESE (ZH)
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In the measurement of micro fo...
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Measuring instruments in general  ,  System and control theory in general 
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