Art

J-GLOBAL ID：201602299166540331   Reference number：13A1247653

Device-Level Vacuum Packaging for a Sandwich Capacitive MEMS Accelerometer

Author (6)： Cai Meini (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...) ,  Che Lufeng (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...) ,  Lin Youling (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...) ,  Zhou Xiaofeng (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...) ,  Li Xiaolin (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...) ,  Wu Jian (State Key Lab. of Transducer Technol.,Shanghai Inst. of Microsystem and Information Technol.,Chinese Acad. of ...)
Material： Bandaoti Jishu  (Semiconductor Technology)
Volume： 37  Issue： 10  Page： 790-794,814  Publication year： 2012 
JST Material Number： C2378A  ISSN： 1003-353X  Document type： Article
Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： A device-level vacuum packagin...

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Terms in the title (1)： MEMS