About Moers J.
About Peter Gruenberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany
About Mikulics M.
About Peter Gruenberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany
About Marso M.
About Faculte ́ des Sciences, de la Technologie et de la Communication, Universite ́ du Luxembourg, L-1359 Luxembourg
About Trellenkamp St.
About Peter Gruenberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany
About Sofer Z.
About Dept. of Inorganic Chemistry, Institute of Chemical Technology, Prague, Technicka ́ 5, 166 28 Prague 6, Czech Republic
About Grutzmacher D.
About Peter Gruenberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany
About Hardtdegen H.
About Peter Gruenberg Institute, Forschungszentrum Juelich, 52425 Juelich, Germany
About IEEE Conference Proceedings
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About RIE
About etching
About dry etching
About FWHM
About ion etching
About lithography
About 発光強度
About Manufacturing technology of solid-state devices
About リソグラフィー技術
About 作製
About LED
About エッチング
About 開発