Art

J-GLOBAL ID：201702224072066760   Reference number：17A0207530

Present situation and future prospect of MEMS wafer level test system

MEMSウエハ試験システムの現状と今後の展望【JST・京大機械翻訳】

Author (6)： Qiao Yue (The 13th Research Institute,China Electronics Technology Group Corporation) ,  Liu Yan (The 13th Research Institute,China Electronics Technology Group Corporation) ,  Cheng Xiaohui (The 13th Research Institute,China Electronics Technology Group Corporation) ,  Ding Liqiang (The 13th Research Institute,China Electronics Technology Group Corporation) ,  Ding Chen (The 13th Research Institute,China Electronics Technology Group Corporation) ,  Liang Faguo (The 13th Research Institute,China Electronics Technology Group Corporation)
Material： Chuanganqi yu Weixitong  (Transducer and Microsystem Technologies)
Volume： 35  Issue： 10  Page： 1-3,7  Publication year： 2016 
JST Material Number： C2884A  ISSN： 2096-2436  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： Wide application of MEMS produ...

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Thesaurus term： standard substance ,  People's Republic of China ,  *MEMS ,  standardization ,  hardware
Semi thesaurus term： モジュール化 , 【Automatic Indexing@JST】

Author keywords (4)： MEMS ,  wafer level test system ,  testing technology ,  reference material( RM)

JST classification (9)： Bonding  (WC07020V) ,  Relays and switches  (NA05060K) ,  Electronic navigation in general  (ND14010O) ,  Speach processing  (JE05000E) ,  Physical properties of polymer solids  (CG02024U) ,  Semiconductor integrated circuit  (NC03162T) ,  Graphic and image processing in general  (JE04010I) ,  Medical materials  (GA05040H) ,  Electrical engineering in general  (NA01010F)

Terms in the title (5)： MEMS ,  ウエハ ,  試験システム ,  現状 ,  展望