Art
J-GLOBAL ID:201702236422089202   Reference number:17A0359400

Study of Temporal Response of Electron Supply from Plasmas to Fast Collection of Bulk Electron: Development of a Bias Electrode: Development of Biasing Electrode

プラズマからバルク電子の高速収集までの電子供給の時間応答の研究:バイアス電極の開発:バイアス印加電極の開発
Author (9):
Material:
Volume: 2015-2016  Page: 521  Publication year: Oct. 2016 
JST Material Number: J0552A  ISSN: 0917-1185  Document type: Article
Country of issue: Japan (JPN)  Language: ENGLISH (EN)

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